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Large area deposition of Pb(Zr,Ti)O.sub.3./sub. thin films for piezoelectric MEMS
- 1.SUCHANECK, G., VIDYARTHI, V.S., REIBOLD, M., DEYNEKA, Alexander, JASTRABÍK, Lubomír, GERLACH, G., HARTUNG, J. Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS. Journal of Electroceramics. 2008, 20(-), 17-20. ISSN 1385-3449. E-ISSN 1573-8663.
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