Počet záznamů: 1
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology
- 1.HUTAŘ, Otakar, ORAL, Martin, MÜLLEROVÁ, Ilona, ROMANOVSKÝ, Vladimír. Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology. Jemná mechanika a optika. 2000, 45(10), 271-272. ISSN 0447-6441.
Počet záznamů: 1