Characterization of RF-spittered self-polarized PZT thin films for sensors arrays

SUCHANECK, G., LIN, W. M., KOEHLER, R., SANDNER, T., GERLACH, G., KRAWIETZ, R., POMPE, W., DEINEKA, Alexander, JASTRABÍK, Lubomír. Characterization of RF-spittered self-polarized PZT thin films for sensors arrays. Vacuum. 2002, 66(-), 473-478. ISSN 0042-207X. E-ISSN 1879-2715.