Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor

MIKA, Filip, FRANK, Luděk. Contrast Generation in Low Energy SEM Imaging of Doped Semiconductor. In: MÜLLEROVÁ, I., ed. Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, 2004, s. 51-52. ISBN 80-239-3246-2.