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Automated system for optical inspection of defects in resist coated non-patterned wafer.

  1. 1.
    KNÁPEK, Alexandr, DROZD, Michal, MATĚJKA, Milan, CHLUMSKÁ, Jana, KRÁL, Stanislav, KOLAŘÍK, Vladimír. Automated system for optical inspection of defects in resist coated non-patterned wafer. In: Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
Počet záznamů: 1