Influence of methane concentration on diamond film morphology and growth rate

0375449 - FZÚ 2012 CZ eng K - Konferenční příspěvek (tuzemská konf.)
Ižák, Tibor - Babchenko, Oleg - Kromka, Alexander - Potměšil, Jiří - Hruška, Karel
Influence of methane concentration on diamond film morphology and growth rate.
Proceedings of the 2nd Winter Education Seminar. Praha: FZÚ AV ČR, 2011 - (Remeš, Z.; Kromka, A.; Ledinský, M.), s. 28-32. ISBN 978-80-260-0911-5.
[Winter educational seminar /2./. Rokytnice n. J. (CZ), 16.02.2011-18.02.2011]
Grant CEP: GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT(CZ) MEB0810081
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: microcrystalline * nanocrystalline diamond * methane concentration * SEM * Raman
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
Trvalý link: http://hdl.handle.net/11104/0208098