Počet záznamů: 1
Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks
- 1.0582161 - FZÚ 2024 US eng A - Abstrakt
Volodin, V.A. - Cheng, Y. - Bulgakov, Alexander V. - Levy, Yoann - Beránek, Jiří - Nagisetty, Siva S. - Zukerstein, Martin - Popov, A. A. - Bulgakova, Nadezhda M.
Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks.
CLEO 2023 Technical Digest Series. Washington: Optica Publishing Group, 2023, č. článku STh1N.6. ISBN 978-1-957171-25-8.
[CLEO: Science and Innovations 2023. 07.05.2023-12.05.2023, San Jose]
Institucionální podpora: RVO:68378271
Klíčová slova: laser crystallization * silicon-germanium multilayers * infrared ultrashort lasers * Raman spectroscopy
Obor OECD: Optics (including laser optics and quantum optics)
https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2023-STh1N.6
Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.
Trvalý link: https://hdl.handle.net/11104/0350233
Počet záznamů: 1