Hauschwitz, P. High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm²/min. In: WATANABE, A., KLING, R., eds. Laser-based Micro- and Nanoprocessing XVI. Vol. 11989. Bellingham: SPIE, 2022, č. článku 119890O. ISBN 978-1-5106-4850-0. ISSN 0277-786X. E-ISSN 1996-756X. Dostupné z: https://doi.org/10.1117/12.2607607.