Nanostructuring of PMMA, GaAs, SiC and Si samples by focused XUV laser beam

FROLOV, O., KOLÁČEK, K., SCHMIDT, J., ŠTRAUS, J., CHOUKOUROV, A. Nanostructuring of PMMA, GaAs, SiC and Si samples by focused XUV laser beam. In: JUHA, L., BAJT, S., GUIZARD, S., eds. Optics Damage and Materials Processing by EUV/X-ray Radiation VII. Bellingham: SPIE, 2019, roč. 11035 (2019), č. článku 110350K. Proceedings of SPIE, 11035. ISBN 978-151062736-9. ISSN 0277-786X. Dostupné z: doi: 10.1117/12.2521444.