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Characteristics of extreme ultraviolet emission from high-Z plasmas
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$a 10.1088/1742-6596/688/1/012079 $2 DOI 100 $a 20191108d m y slo 03 ba 101 0-
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$a Characteristics of extreme ultraviolet emission from high-Z plasmas 215 $a 4 s. $c P 463 -1
$1 001 cav_un_epca*0472124 $1 011 $a 1742-6588 $1 200 1 $a Journal of Physics: Conference series $h 688 $v S. 1-4 $1 210 $a Bristol $c IOP Publishing Ltd. $d 2016 608 $a Proceedings Paper 610 $a extreme ultraviolet (EUV) lithography 610 $a soft x-ray sources 700 -1
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