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Absolute and relative surface profile interferometry using multiple frequency-scanned lasers
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$a Absolute and relative surface profile interferometry using multiple frequency-scanned lasers 215 $a 10 s. $c P 463 -1
$1 001 cav_un_epca*0469262 $1 010 $a 978-1-5106-0753-8 $1 011 $a 0277-786X $1 200 1 $a Proceedings of SPIE 10151, Optics and Measurement International Conference 2016 $i OAM 2016 Proceedings $h 10151 $1 205 $a 10151 $1 210 $a Bellingham $c SPIE, Society of Photo-Optical Instrumentation Engineers $d 2016 $1 225 $a SPIE $1 702 1 $4 340 $a Kovačičinová $b J. 610 $a Absolute interferometry 610 $a diode laser 610 $a surface prole 610 $a length measurement 700 -1
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