Coordinate interferometric measuring system for positioning of a sample in electron-beam writer

LAZAR, J., HOLÁ, M., HRABINA, J., OULEHLA, J., ČÍP, O., VALTR, M., KLAPETEK, P. Coordinate interferometric measuring system for positioning of a sample in electron-beam writer. In: NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. Wroclaw: Wroclaw University of Technology, 2016.