Deposition and Analysis of Hard and Moderately Ductile MoBC Coatings by pulsed DC Sputtering

0458471 - ÚJF 2017 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Peřina, Vratislav - Souček, P. - Vašina, P. - Buršíková, V. - Havránek, Vladimír
Deposition and Analysis of Hard and Moderately Ductile MoBC Coatings by pulsed DC Sputtering.
Book of Contributed Papers. Bratislava: Comenius University in Bratislava, 2015, s. 248-252. ISBN 978-80-8147-027-1.
[Symposium on Application of Plasma Processes COST TD1208 Workshop on Application of Gaseous Plasma with Liquids: SAPP XX /20./. Tatranská Lomnica (SK), 17.01.2015-22.01.2015]
Grant CEP: GA MŠMT(CZ) LM2011019
Institucionální podpora: RVO:61389005
Klíčová slova: coatings * DC magnetron sputtering * RBS
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech

Superhard MoxByCz coatings with promising mechanical properties were prepared by pulsed DC magnetron sputtering. Structure information obtained from XRD is not enough to optimize the deposition process to reach stoichiometric Mo2BC film. EDX and WDX technique does not show sufficient resolution to distinguish Mo and B in the spectra. Rutherford back scattering it very suitable technique to evaluate chemical composition of the whole of prepared coatings and it was used for optimization of the coating stoichiometry.
Trvalý link: http://hdl.handle.net/11104/0258742