Počet záznamů: 1
Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub./N.sub.2./sub. gas chemistry
- 1.Vojs, M., Varga, M., Babchenko, O., Ižák, T., Mikolášek, M., Marton, M., Kromka, A. Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H2/CH4/CO2/N2 gas chemistry. In: BRUNNER, R., ed. Proceedings of 8th Solid State Surfaces and Interfaces. Bratislava: Comenius University, 2013, s. 187. ISBN 978-80-223-3501-0.
Počet záznamů: 1
