0390465 - FZÚ 2013 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Ižák, Tibor - Babchenko, Oleg - Kromka, Alexander - Potocký, Štěpán - Marton, M. - Veselý, M.
From micro- to nanocrystalline diamond films.
Proceeding of School of Vacuum Technology - Vacuum and Advanced Materials. Bratislava: Slovenská vákuová spoločnosť, 2011 - (Varga, M.; Veselý, M.), s. 14-19. ISBN 978-80-969435-9-3.
[School of Vacuum Technology - Vacuum and Advanced Materials. Štrbské Pleso (SK), 08.09.2011-11.09.2011]
Grant CEP: GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT(CZ) MEB0810081
Výzkumný záměr: CEZ:AV0Z10100521
Klíčová slova: nanocrystalline * microcrystalline diamond * MWCVD * Raman * SEM
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

In this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article.

Trvalý link: http://hdl.handle.net/11104/0219327