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Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
- 1.BRZOBOHATÝ, O., BURŠÍKOVÁ, V., NEČAS, D., VALTR, M., TRUNEC, D. Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation. Journal of Physics D-Applied Physics. 2008, 41(3), 035213:1-8. ISSN 0022-3727. E-ISSN 1361-6463. Dostupné z: doi: 10.1088/0022-3727/41/3/035213
Počet záznamů: 1