0304025 - URE-Y 20020040 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Franc, J. - Novotný, Jan
Surface roughness and resistivity of thin films.
Pilsen: University of West Bohemia, 2002. ISBN 80-7082-881-1. In: Applied Electronics 2002. - (Pinker, J.), s. 63-66
[Applied Electronics 2002. Pilsen (CZ), 11.09.2002-12.09.2002 (K)]
Grant CEP: GA AV ČR KSK1010104 Projekt 04/01:4046
Výzkumný záměr: CEZ:AV0Z2067918
Klíčová slova: surface treatment * surface contamination * thin films resistors
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Surface finish of alumina thin film substrates was measured with stylus profilometer. A connection between the obtained values of Ra and the thin film resistance was studied. No correlation can be found owing to big stylus radius and computation method used in profilometer.
Trvalý link: http://hdl.handle.net/11104/0114169