Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings

Name: Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings
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Maček, M.; Mišina, Martin; Čekada, M.; Panjan, P.

Počet záznamů: 1

Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings

1.

SYSNO	0134359
Název	Energy-resolved mass spectroscopy of Ar-C₂H₂-N₂ plasma, performed during ion plating of TiC and Ti N hard coatings
Tvůrce(i)	Maček, M. (SI) Mišina, Martin (FZU-D) Čekada, M. (SI) Panjan, P. (SI)
Zdroj.dok.	Surface and Coatings Technology. 174-175, - (2003), s. 943-946. - : Elsevier
Konference	International Conference on Plasma Surface Engineering /11./, Garmisch-Partenkirchen, 09.09.2002-13.09.2002
Druh dok.	Článek v odborném periodiku
CEZ	AV0Z1010914 - FZU-D
Jazyk dok.	eng
Země vyd.	NL
Klíč.slova	energy-resolved mass spectroscopy * Ar-C2H2-N2 plasma * ion plating
Trvalý link	http://hdl.handle.net/11104/0032264

Počet záznamů: 1