Počet záznamů: 1
Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering
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$a eng 102 $a NL 200 1-
$a Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering 215 $a 7 s. 463 -1
$1 001 cav_un_epca*0257628 $1 011 $a 0257-8972 $e 1879-3347 $1 200 1 $a Surface and Coatings Technology $v 142-144, - (2001), s. 348-354 $1 210 $c Elsevier 610 1-
$a DC 610 1-
$a magnetron 610 1-
$a reactive sputtering 610 1-
$a titanium nitride 610 1-
$a tungsten 610 1-
$a energy resolved mass spectroscopy 700 -1
$3 cav_un_auth*0100391 $a Mišina $b Martin $p FZU-D $4 070 $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0042222 $a Shaginyan $b L. R. $y UA $4 070 701 -1
$3 cav_un_auth*0038440 $a Maček $b M. $y SI $4 070 701 -1
$3 cav_un_auth*0038442 $a Panjan $b P. $y SI $4 070
Počet záznamů: 1