Jastrabík, Lubomír - Soukup, Ladislav - Shaginyan, L. R. - Onoprienko, A. A.
Deposition conditions and composition and structure relationships for nitride carbon films obtained by ECR plasma-assisted CVD and reactive rf magnetron sputtering.
Surface and Coatings Technology. Roč. 123, - (2000), s. 261-267. ISSN 0257-8972. E-ISSN 1879-3347
Grant CEP: GA AV ČR IAA1010827
Impakt faktor: 1.002, rok: 2000
http://hdl.handle.net/11104/0031283