Počet záznamů: 1
RF and DC plasma assisted laser deposition of a-CN.sub.x./sub. thin films
- 1.Tomov, R. I., Jelínek, M., Bulíř, J. RF and DC plasma assisted laser deposition of a-CNx thin films. In: ATANOSOV, P., STOYANOV, D. V., eds. Tenth International School on Quantum Electronics: Laser Physics and Applications. Bellingham: SPIE The International Society for Optical Engineering, 1999, s. 344-348. Proceedings of the SPIE., 3571. ISSN 0277-786X.
Počet záznamů: 1
