A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment

Name: A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment
Availability: OutOfStock

Špatenka, P.; Leipner, I.; Vlček, J.; Musil, Jindřich

Počet záznamů: 1

A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment

1.

SYSNO	0132075
Název	A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment
Tvůrce(i)	Špatenka, P. (CZ) Leipner, I. (CZ) Vlček, J. (CZ) Musil, Jindřich (FZU-D)_{RID, ORCID}
Zdroj.dok.	Plasma Sources Science & Technology. Roč. 6, - (1997), s. 46-52. - : Institute of Physics Publishing
Druh dok.	Článek v odborném periodiku
Grant	GV106/96/K245 GA ČR - Grantová agentura ČR
Jazyk dok.	eng
Země vyd.	GB
Trvalý link	http://hdl.handle.net/11104/0030113

Počet záznamů: 1