A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment

Name: A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment
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Špatenka, P.; Leipner, I.; Vlček, J.; Musil, Jindřich

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A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment

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Špatenka, P. - Leipner, I. - Vlček, J. - Musil, Jindřich
A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment.
Plasma Sources Science & Technology. Roč. 6, - (1997), s. 46-52. ISSN 0963-0252. E-ISSN 1361-6595
Grant CEP: GA ČR GV106/96/K245
http://hdl.handle.net/11104/0030113

Počet záznamů: 1