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A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment
- 1.ŠPATENKA, P., LEIPNER, I., VLČEK, J., MUSIL, J. A comparision of internal plasma parameters in a conventional planar magnetron and magnetron with enhanced additional plasma confine ment. Plasma Sources Science & Technology. 1997, 6(-), 46-52. ISSN 0963-0252. E-ISSN 1361-6595.
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