Kučírková, A. - Navrátil, K. - Zemek, Josef
Depth inhomogenity of deposited thin films: Applications to semi-insulating polycrystalline silicon films.
Thin Solid Films. Roč. 323, - (1998), s. 53-58. ISSN 0040-6090. E-ISSN 1879-2731
Grant CEP: GA AV ČR IAA1010609
Impakt faktor: 1.019, rok: 1998
http://hdl.handle.net/11104/0029787