Počet záznamů: 1
Depth inhomogenity of deposited thin films: Applications to semi-insulating polycrystalline silicon films
- 1.KUČÍRKOVÁ, A., NAVRÁTIL, K., ZEMEK, Josef. Depth inhomogenity of deposited thin films: Applications to semi-insulating polycrystalline silicon films. Thin Solid Films. 1998, 323(-), 53-58. ISSN 0040-6090. E-ISSN 1879-2731.
Počet záznamů: 1