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The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD
- 1.SHAGINYAN, L. R., JASTRABÍK, L., FENDRYCH, F. - NOVÁK, J., ed. The influence of deposition conditions on the growth and mechanical properties of CxHy films obtained by ECR plasma-activated CVD. Surface and Coatings Technology. 1998, 99(-), 42-51. ISSN 0257-8972. E-ISSN 1879-3347.
Počet záznamů: 1