Processing of Signal in the Everhart-Thornley Detector

Počet záznamů: 1

1.

SYSNO ASEP	0049019
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Processing of Signal in the Everhart-Thornley Detector
Title	Zpracování signálu Everhart-Thornleyho detektorem
Author(s)	Novák, Libor (UPT-D) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : ISI AS CR, 2006 / Müllerová I. - ISBN 80-239-6285-X
Pages	s. 57-58
Number of pages	2 s.
Action	Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./
Event date	22.05.2006-26.05.2006
VEvent location	Skalský dvůr
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	SEM ; detection ; Everhart-Thornley
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA102/04/2144 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2007

Počet záznamů: 1