Počet záznamů: 1
Processing of Signal in the Everhart-Thornley Detector
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SYSNO ASEP 0049019 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Processing of Signal in the Everhart-Thornley Detector Title Zpracování signálu Everhart-Thornleyho detektorem Author(s) Novák, Libor (UPT-D)
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDSource Title Proceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : ISI AS CR, 2006 / Müllerová I. - ISBN 80-239-6285-X Pages s. 57-58 Number of pages 2 s. Action Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./ Event date 22.05.2006-26.05.2006 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords SEM ; detection ; Everhart-Thornley Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/04/2144 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation The paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2007
Počet záznamů: 1