Počet záznamů: 1  

Processing of Signal in the Everhart-Thornley Detector

  1. 1.
    SYSNO ASEP0049019
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleProcessing of Signal in the Everhart-Thornley Detector
    TitleZpracování signálu Everhart-Thornleyho detektorem
    Author(s) Novák, Libor (UPT-D)
    Müllerová, Ilona (UPT-D) RID, SAI, ORCID
    Source TitleProceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : ISI AS CR, 2006 / Müllerová I. - ISBN 80-239-6285-X
    Pagess. 57-58
    Number of pages2 s.
    ActionRecent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./
    Event date22.05.2006-26.05.2006
    VEvent locationSkalský dvůr
    CountryCZ - Czech Republic
    Event typeWRD
    Languageeng - English
    CountryCZ - Czech Republic
    KeywordsSEM ; detection ; Everhart-Thornley
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    R&D ProjectsGA102/04/2144 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    AnnotationThe paper deals with the detection of secondary electrons in SEM by means of Everhart-Thornley type of detector. Experimental data describing signal processing in the E.-T. detector are presented. Results of a numerical model of the E.-T.detector are compared with the performance of a real detector.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2007
Počet záznamů: 1  

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