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Optical emission spectroscopy analysis of microwave plasma-enhanced chemical vapor deposition systems dynamic gas response
- 1.Lambert, N., Sung, K.-d., Mortet, V. Optical emission spectroscopy analysis of microwave plasma-enhanced chemical vapor deposition systems dynamic gas response. Physica Status Solidi A. 2023, 220(4), 2200322. ISSN 1862-6300. E-ISSN 1862-6319. Dostupné z: doi: 10.1002/pssa.202200322.
Počet záznamů: 1