Počet záznamů: 1
Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests
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SYSNO ASEP 0504377 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests Tvůrce(i) Tinoco Navaro, Hector Andres (UFM-A) ORCID
Holzer, Jakub (UFM-A) ORCID
Pikálek, Tomáš (UPT-D) RID, ORCID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Lazar, Josef (UPT-D) RID, ORCID, SAI
Chlupová, Alice (UFM-A) RID, ORCID
Kruml, Tomáš (UFM-A) RID, ORCID
Hutař, Pavel (UFM-A) RID, ORCIDCelkový počet autorů 9 Zdroj.dok. Thin Solid Films. - : Elsevier - ISSN 0040-6090
Roč. 672, FEB (2019), s. 66-74Poč.str. 9 s. Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova Elastic properties ; Bulge test ; Thin film ; Finite element analysis ; Silicon nitride Vědní obor RIV JH - Keramika, žáruvzdorné materiály a skla Obor OECD Ceramics Vědní obor RIV – spolupráce Ústav přístrojové techniky - Elektronika a optoelektronika, elektrotechnika CEP EF16_013/0001823 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Způsob publikování Omezený přístup Institucionální podpora UFM-A - RVO:68081723 ; UPT-D - RVO:68081731 UT WOS 000456726000011 EID SCOPUS 85059843428 DOI 10.1016/j.tsf.2018.12.039 Anotace This paper describes and applies a methodology to determine the elastic properties of freestanding thin mem-branes by means of a bulge test and a numerical approach. The numerical procedure is based on the combinationof two standard methods i.e. finite element analysis and classical analytical solutions to calculate elasticproperties of thin films. Bulge tests were conducted on silicon nitride (Si3N4) monolayer of 2 × 2mm(square)and 3.5 × 1.5mm(rectangular) membranes with the aim to determine elastics properties (Young's modulus (E)and Poison's ratio (v)) that define the load-deflection curves of both membranes. With this purpose, an errorfunction was constructed for each membrane which involved finite element solutions, analytical solutions andexperimental measurements. Error functions were found and minimized by mapping a set of elastic parametersfor the two membranes (square and rectangular). A unique solution was determined in the intersection of bothlinear approximations, obtaining 236GPaforEand 0.264 forv. It is well known that in a traditional bulge testanalysis only one of both biaxial modulus can be determined and not a combination ofEandv. Numerical resultsshow that calculated load-deflection curves agree well with the measurements obtained for both square andrectangular membranes experimentally. The proposed methodology is only applicable in thin films with elasticbehavior, however generalization for more complicated geometries is possible. Pracoviště Ústav fyziky materiálu Kontakt Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Rok sběru 2020 Elektronická adresa https://www.sciencedirect.com/science/article/pii/S0040609018308484?via%3Dihub
Počet záznamů: 1