Coordinate interferometric measuring system for positioning of a sample in electron-beam writer

Počet záznamů: 1

1.

SYSNO	0467527
Název	Coordinate interferometric measuring system for positioning of a sample in electron-beam writer
Tvůrce(i)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Holá, Miroslava (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Oulehla, Jindřich (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Valtr, M. (CZ) Klapetek, P. (CZ)
Zdroj.dok.	NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. - Wroclaw : Wroclaw University of Technology, 2016
Konference	NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./, 09.03.2016 - 11.03.2016, Wroclaw
Druh dok.	Abstrakt
Institucionální podpora	UPT-D - RVO:68081731
Jazyk dok.	eng
Země vyd.	PL
Klíč.slova	SPM * nanometrology * nanoscale * nanopositioning interferometry
Trvalý link	http://hdl.handle.net/11104/0265623

Počet záznamů: 1