Coordinate interferometric measuring system for positioning of a sample in electron-beam writer

LAZAR, Josef, HOLÁ, Miroslava, HRABINA, Jan, OULEHLA, Jindřich, ČÍP, Ondřej, VALTR, M., KLAPETEK, P. Coordinate interferometric measuring system for positioning of a sample in electron-beam writer. In: NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. Wroclaw: Wroclaw University of Technology, 2016.