High efficiency high rate microcrystalline silicon thin-film solar cells deposited at plasma excitation frequencies larger than 100 MHz

STROBEL, C., LESZCZYNSKA, B., MERKEL, U., KUSKE, J., FISCHER, D.D., ALBERT, M., HOLOVSKÝ, Jakub, MICHARD, S. High efficiency high rate microcrystalline silicon thin-film solar cells deposited at plasma excitation frequencies larger than 100 MHz. Solar Energy Materials and Solar Cells. 2015, 143(Dec), 347-353. ISSN 0927-0248. E-ISSN 1879-3398. Dostupné z: doi: 10.1016/j.solmat.2015.07.014