Počet záznamů: 1
Blaze Gratings with a Ribbed Back Slope
- 1.
SYSNO ASEP 0464389 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV D - Článek ve sborníku Název Blaze Gratings with a Ribbed Back Slope Tvůrce(i) Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Meluzín, Petr (UPT-D) RID, ORCID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Matějka, Milan (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Král, Stanislav (UPT-D) RID, SAICelkový počet autorů 7 Zdroj.dok. NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. - Ostrava : Tanger, 2017 - ISBN 978-80-87294-71-0 Rozsah stran s. 757-761 Poč.str. 5 s. Forma vydání Tištěná - P Akce NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./ Datum konání 19.10.2016 - 21.10.2016 Místo konání Brno Země CZ - Česká republika Typ akce WRD Jazyk dok. eng - angličtina Země vyd. CZ - Česká republika Klíč. slova nano patterning ; blazed diffraction grating ; Gaussian-type beam ; variable-shaped beam ; electron beam writer Vědní obor RIV BH - Optika, masery a lasery Obor OECD Nano-processes (applications on nano-scale) CEP TE01020233 GA TA ČR - Technologická agentura ČR LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Institucionální podpora UPT-D - RVO:68081731 UT WOS 000410656100131 Anotace Binary relief phase-modulated gratings provide symmetrical diffraction of the incoming light beam. Asymmetrical gratings, e.g. asymmetrical triangular blazed gratings, are characteristic by an asymmetrical diffraction behavior, where one of the first diffraction orders is more important than the other one. Electron beam lithography is a suitable and flexible tool for patterning of such kind of gratings. High quality results can be readily obtained when the period of the grating is relatively large and the relief depth is relatively low, this is the case of gratings with a small blaze angle. As the blaze angle increases, the quality of result suffers from several patterning-related issues. One of the problems is a reflection of the incoming light beam from the back slope (anti-blaze facet) of the blaze grating. We propose a novel configuration, with a ribbed modulation of the back slope. This modulation is perpendicular to the direction of the grating grooves. This paper presents an analysis of the proposed blazed grating configuration. E-beam pattern generators were used to prepare a few
samples of blaze gratings with a ribbed back slope. One part of the experiment was performed with a Gaussianshaped beam and another one with the variable-shaped beam. Results of the experiment are presented.
Finally, we discuss the optical performance of two blaze gratings with similar parameters, one of them is with the flat back slope and another one is with the ribbed back slope.Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2018
Počet záznamů: 1