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Ion Micro Beam, promising methods for interdisciplinary research
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SYSNO ASEP 0460790 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Ion Micro Beam, promising methods for interdisciplinary research Tvůrce(i) Cutroneo, Mariapompea (UJF-V) ORCID, RID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Torrisi, L. (IT)
Švecová, B. (CZ)Celkový počet autorů 4 Zdroj.dok. Journal of Instrumentation. - : Institute of Physics Publishing - ISSN 1748-0221
Roč. 11, MAY (2016), C05001Poč.str. 11 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova accelerator application ; accelerator subsystems and technolgies ; ion sources Vědní obor RIV BG - Jaderná, atomová a mol. fyzika, urychlovače CEP GBP108/12/G108 GA ČR - Grantová agentura ČR LM2011019 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Institucionální podpora UJF-V - RVO:61389005 UT WOS 000377851700001 EID SCOPUS 84969930929 DOI 10.1088/1748-0221/11/05/C05001 Anotace An increasing attractiveness of top-down nanotechnology using nuclear microprobe techniques have been gathered to the micro and nano patterning process for polymers. This paper presents the research activity on innovative promising techniques able to produce three-dimensional (3D) micro-structures in polymeric resists as well as to obtain images of fabricated nanostructures at Tandetron Laboratory (LT) of the Nuclear Physics Institute in Rez (Czech Republic). The Proton Beam Writing (PBW) technique was used to irradiate PMMA resist with energy of MeVs protons. The fabricated patterns were developed in chemical bath using different etching rates. An overview of micro-scale structures have been fabricated selecting the beam, the energy, the fluence and the exposition time. The produced structures were investigated by different analysis techniques among which Scanning Transmission Ion Microscopy (STIM). The characterizations of the fabricated microtunnels are presented and discussed. Pracoviště Ústav jaderné fyziky Kontakt Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Rok sběru 2017
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