Počet záznamů: 1
Xenon capillary discharge as a source of soft X-ray
- 1.0179037 - UFP-V 20020054 RIV CZ eng J - Článek v odborném periodiku
Vrba, Pavel - Vrbová, M.
Xenon capillary discharge as a source of soft X-ray.
Czechoslovak Journal of Physics. Roč. 52, supplement D (2002), s. 112-116. ISSN 0011-4626.
[Symposium on Plasma Physics and Technology/20th./. Prague, 10.06.2002-13.06.2002]
Výzkumný záměr: CEZ:AV0Z2043910
Klíčová slova: capillary discharge, soft X-ray
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
Impakt faktor: 0.311, rok: 2002
A novel type of capillary discharge device was demonstrated to obtain soft X-ray emission compplying with the demand for the future micro lithography[1].Experiments with the Xenon filled capillary lead to generation of incoherent radiation in the spectral region (13ö14)nm.We have done a theoretical analysis of the experiment based on previous work[2].
Trvalý link: http://hdl.handle.net/11104/0001641
Počet záznamů: 1