Digital control of beams position in high-resolution interferometer for calibration of precise length sensors

ČÍP, O., ŠMÍD, R., BUCHTA, Z., ČÍŽEK, M., LAZAR, J. Digital control of beams position in high-resolution interferometer for calibration of precise length sensors. In: NanoScale 2008 - 8th Seminar on Quantitative Microscopy (QM) and 4th Seminar on Nanoscale Calibration Standards and Methods. Torino: Istituto Nazionale di Ricerca Metrologica, 2008, s. 44. ISBN N.