Počet záznamů: 1
Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film
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SYSNO ASEP 0574018 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film Tvůrce(i) Romanenko, Oleksandr V. (UJF-V) ORCID, SAI
Lavrentiev, Vasyl (UJF-V) RID, ORCID, SAI
Borodkin, Andrei (URE-Y)
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Macková, Anna (UJF-V) RID, ORCID, SAICelkový počet autorů 5 Zdroj.dok. Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 538, MAY (2023), s. 123-130Poč.str. 8 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. NL - Nizozemsko Klíč. slova PMMA shrinkage ; Ion beam lithography ; Microstructuring ; Diffraction grating Obor OECD Nuclear physics CEP EF18_053/0017163 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Způsob publikování Omezený přístup Institucionální podpora UJF-V - RVO:61389005 ; URE-Y - RVO:67985882 UT WOS 001027901300001 EID SCOPUS 85150335122 DOI 10.1016/j.nimb.2023.02.001 Anotace The present work focuses on the shrinkage of PMMA films under irradiation and its application to the creation of optical devices. We prepared the free-standing PMMA films in four different thicknesses (13, 21, 32, and 43 & mu,m), and PMMA films of the same thickness, but deposited on a glass substrate. A diffraction grating was chosen as the optical device to show the applicability of the method. The study revealed that at a film thickness of 13-32 & mu,m, the shrinkage of the free-standing film increases proportionally to its thickness, while the film on the substrate does not have a pronounced dependence. Films with the thickness of 43 & mu,m do not follow this trend. It was found that under the same irradiation conditions, the film on the substrate shrinks more compared to the free-standing film. Interference patterns from the created diffraction gratings were shown to present spurious illumination areas. Pracoviště Ústav jaderné fyziky Kontakt Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Rok sběru 2024 Elektronická adresa https://doi.org/10.1016/j.nimb.2023.02.001
Počet záznamů: 1