Počet záznamů: 1
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
- 1.0533967 - FZÚ 2021 RIV US eng J - Článek v odborném periodiku
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge.
Applied Physics Letters. Roč. 116, č. 6 (2020), s. 1-4, č. článku 064101. ISSN 0003-6951. E-ISSN 1077-3118
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: plasma * HiPIMS sputtering * Langmuir probe
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 3.791, rok: 2020
Způsob publikování: Omezený přístup
https://doi.org/10.1063/1.5140650
High power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in argon gas was investigated by time-resolved electrical (Langmuir) probe diagnostics and by time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply.
Trvalý link: http://hdl.handle.net/11104/0312191
Počet záznamů: 1