Počet záznamů: 1
Characterization of RF-spittered self-polarized PZT thin films for sensors arrays
- 1.Suchaneck, G., Lin, W. M., Koehler, R., Sandner, T., Gerlach, G., Krawietz, R., Pompe, W., Deineka, A., Jastrabík, L. Characterization of RF-spittered self-polarized PZT thin films for sensors arrays. Vacuum. 2002, 66(-), 473-478. ISSN 0042-207X. E-ISSN 1879-2715.
Počet záznamů: 1