Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks

VOLODIN, V.A., CHENG, Y., BULGAKOV, A., LEVY, Y., BERÁNEK, J., NAGISETTY, S. S., ZUKERSTEIN, M., POPOV, A. A., BULGAKOVA, N. M. Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In: CLEO 2023 Technical Digest Series. Washington: Optica Publishing Group, 2023, č. článku STh1N.6. ISBN 978-1-957171-25-8. Dostupné z: doi: 10.1364/CLEO_SI.2023.STh1N.6.