Počet záznamů: 1
Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization
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SYSNO ASEP 0511855 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization Tvůrce(i) Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Jagerová, Adéla (UJF-V) ORCID, SAI
Mikšová, Romana (UJF-V) RID, ORCID, SAI
Nekvindová, P. (CZ)
Cajzl, J. (CZ)
Bottger, R. (DE)
Akhmadaliev, S. (DE)Celkový počet autorů 8 Číslo článku UNSP 108892 Zdroj.dok. Vacuum. - : Elsevier - ISSN 0042-207X
Roč. 169, č. 11 (2019)Poč.str. 9 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova ZnO ; RBS ; ion implantation Vědní obor RIV BG - Jaderná, atomová a mol. fyzika, urychlovače Obor OECD Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) CEP LM2015056 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy EF16_013/0001812 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy GA18-03346S GA ČR - Grantová agentura ČR Způsob publikování Omezený přístup Institucionální podpora UJF-V - RVO:61389005 UT WOS 000494887000044 EID SCOPUS 85071987675 DOI 10.1016/j.vacuum.2019.108892 Anotace This paper presents a study of defect evolution in various ZnO crystallographic cuts caused by Au implantation. The investigation has focused on ZnO structure characterisation, Au distribution and the interior morphology of the a-, m- and c-planes ZnO single crystals implanted with 400 keV Au+ ions at the ion fluences of 5 x 10(14) and 1 x 10(15) cm(-2) and subsequently annealed at 600 degrees C in O-2. The structure modification was studied using Rutherford backscattering spectrometry in the channelling mode and Raman spectroscopy. After the ion-implantation process, low surface damage was observed in all ZnO orientations unlike deep structural damage. Deep structural damage grew with increased Au-ion fluence and Au did not exhibit strong out-diffusion from the depth to the surface during the post-implantation annealing. Small but noticeable differences were observed between different ZnO orientations. RBS measurements during ion implantation revealed more progressive deep-damage formation in the c- and m-planes than in the a-plane ZnO. Simultaneously, the smallest Zn sub-lattice disorder deduced from RBS/C measurements was observed in the a-plane ZnO. During post-implantation annealing, a slight structure recovery (about 4%) was observed in all orientations. Raman spectroscopy confirmed the increasing structure disorder with the enhanced ion fluence for all as-implanted ZnO orientations and a partial reconstruction of the ZnO structure during annealing, when the intensity of E-2 phonons was increased and that of longitudinal optical (LO) phonons was suppressed because of the disorder recovery. E-2 (high) and E-1 (LO) Raman phonon modes connected with oxygen sub-lattice ordering/disordering have been investigated in detail - they show a significant modification mainly in the m-plane. The cause of the different behaviour of ZnO planes as well as the differences in the incorporation and movement of Au and Er atoms in the ZnO structure are discussed in the work. Pracoviště Ústav jaderné fyziky Kontakt Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Rok sběru 2020 Elektronická adresa https://doi.org/10.1016/j.vacuum.2019.108892
Počet záznamů: 1