Počet záznamů: 1
Multiwavelength digital holography for polishing tool shape measurement
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SYSNO ASEP 0499540 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV D - Článek ve sborníku Název Multiwavelength digital holography for polishing tool shape measurement Tvůrce(i) Doleček, Roman (UFP-V) RID
Lédl, Vít (UFP-V) RID
Psota, Pavel (UFP-V) RID, ORCID
Václavík, Jan (UFP-V) RID
Vojtíšek, Petr (UFP-V) RIDCelkový počet autorů 5 Číslo článku 88840E Zdroj.dok. Proceedings of SPIE. - Rochester : SPIE-int. soc. optical engineering, 2013 / Bentley J. L. ; Pfaff M. - ISSN 0277786X - ISBN 978-081949747-5 Poč.str. 6 s. Forma vydání Tištěná - P Akce Optifab 2013 Datum konání 14.10.2013 - 17.10.2013 Místo konání Rochester Země US - Spojené státy americké Typ akce WRD Jazyk dok. eng - angličtina Země vyd. US - Spojené státy americké Klíč. slova polishing ; holographic interferometry ; multiwavelength ; contouring Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika Obor OECD Electrical and electronic engineering CEP ED2.1.00/03.0079 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Institucionální podpora UFP-V - RVO:61389021 UT WOS 000327590200010 EID SCOPUS 84888165968 DOI 10.1117/12.2030004 Anotace Classical mechano-chemical polishing is still a valuable technique, which gives unbeatable results for some types of optical surfaces. For example, optics for high power lasers requires minimized subsurface damage, very high cosmetic quality, and low mid spatial frequency error. One can hardly achieve this with use of subaperture polishing. The shape of the polishing tool plays a crucial role in achieving the required form of the optical surface. Often the shape of the polishing tool or pad is not known precisely enough during the manufacturing process. The tool shape is usually premachined and later is changed during the polishing procedure. An experienced worker could estimate the shape of the tool indirectly from the shape of the polished element, and that is why he can achieve the required shape in few reasonably long iterative steps. Therefore the lack of the exact tool shape knowledge is tolerated. Sometimes, this indirect method is not feasible even if small parts are considered. Moreover, if processes on machines like planetary (continuous) polishers are considered, the incorrect shape of the polishing pad could extend the polishing times extremely. Every iteration step takes hours. Even worse, polished piece could be wasted if the pad has a poor shape. The ability of the tool shape determination would be very valuable in those types of lengthy processes. It was our primary motivation to develop a contactless measurement method for large diffusive surfaces and demonstrate its usability. The proposed method is based on application of multiwavelength digital holographic interferometry with phase shift. Pracoviště Ústav fyziky plazmatu Kontakt Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Rok sběru 2020
Počet záznamů: 1