Počet záznamů: 1
Quantitative comparison of simulated and measured signals in the STEM mode of a SEM
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SYSNO ASEP 0489596 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Quantitative comparison of simulated and measured signals in the STEM mode of a SEM Tvůrce(i) Walker, Christopher (UPT-D) RID
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Mika, Filip (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 5 Zdroj.dok. Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 415, JAN (2018), s. 17-24Poč.str. 8 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. NL - Nizozemsko Klíč. slova low-energy electrons ; multiple scattering ; elastic-scattering ; transmission Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika Obor OECD Coating and films CEP TE01020118 GA TA ČR - Technologická agentura ČR LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Institucionální podpora UPT-D - RVO:68081731 UT WOS 000424309000003 EID SCOPUS 85033458029 DOI 10.1016/j.nimb.2017.10.034 Anotace The transmission of electrons with energies 15 keV and 30 keV through Si and Au films of 100 nm thickness each have been studied in a Scanning Transmission Electron Microscope. The electrons that were transmitted through the films were detected using a multi-annular photo-detector consisting of a central Bright Field (BF) and several Dark Field (DF) detectors. For the experiment the detector was gradually offset from the axis and the signal from the central BF detector was studied as a function of the offset distance and compared with MC simulations. The experiment showed better agreement between experiment and several different MC simulations as compared to previous results, but differences were still found particularly for low angle scattering from Si. Data from Au suggest that high energy secondary electrons contribute to the signal on the central BF detector for low primary beam energies, when the STEM detector is in its usual central position. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2019
Počet záznamů: 1