Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O.sub.2./sub. mixtures

ČADA, M., LUNDIN, D., HUBIČKA, Z. Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O₂ mixtures. Journal of Applied Physics. 2017, 121(17), 1-7), 171913. ISSN 0021-8979. E-ISSN 1089-7550. Dostupné z: doi: 10.1063/1.4977821