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Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study
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SYSNO ASEP 0422223 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study Tvůrce(i) Potocký, Štěpán (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Davydova, Marina (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAIZdroj.dok. Physica Status Solidi B : Basic Solid State Physics. - : Wiley - ISSN 0370-1972
Roč. 250, č. 12 (2013), 2723–2726Poč.str. 4 s. Jazyk dok. eng - angličtina Země vyd. DE - Německo Klíč. slova CNT ; Langmuir probe ; nanocrystalline diamond ; plasma enhanced CVD ; Raman spectroscopy ; SEM Vědní obor RIV BM - Fyzika pevných látek a magnetismus CEP TA01011740 GA TA ČR - Technologická agentura ČR GAP205/12/0908 GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 UT WOS 000328325900042 EID SCOPUS 84889086173 DOI 10.1002/pssb.201300085 Anotace The versatility of linear antenna microwave plasma system, growth of diamond films with variable grain sizes, and efficient synthesis of oriented carbon nanotubes when combined with radiofrequency substrate bias were studied. Grown diamond films and carbon nanotubes are characterized by Raman spectroscopy and scanning electron microscopy. Successful surface functionalization of carbon nanotubes without their destruction is shown in agreement to plasma state as measured by Langmuir probe. We show that diamond growth from large to ultra-small size grains can be easily driven by total gas pressure. Langmuir probe measurements indicate low electron effective energy at substrate position and higher ion energy at the lowest total gas pressure. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2014
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