Sub- and Supercritical Water As a New Agent for Microdevices Production

0381023 - ÚIACH 2013 PL eng A - Abstrakt
Karásek, Pavel - Grym, Jakub - Roth, Michal - Foret, František - Planeta, Josef
Sub- and Supercritical Water As a New Agent for Microdevices Production.
Abstract Book. 29th International Symposium on Chromatography,. Toruń: Adam Marszałek, 2012 - (Węgłowska, J.). s. 650. ISBN 978-83-7780-440-7.
[International Symposium on Chromatography /29./. 09.09.2012-13.02.2012, Toruń]
Grant CEP: GA MŠMT(CZ) CZ.1.07/2.3.00/20.0182; GA ČR(CZ) GAP106/12/0522; GA ČR(CZ) GAP206/11/0138
Institucionální podpora: RVO:68081715
Klíčová slova: lab-on-a-chip * substrate leaching * supercritical water
Kód oboru RIV: CB - Analytická chemie, separace

Application was investigated of supercritical water as the leaching agent in production of microchannels in the glass substrates for microchip fabrication. Supercritical water appears to provide certain advantages over the more traditional leaching agents containing hydrofluoric acid.
Trvalý link: http://hdl.handle.net/11104/0211587