Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N.sub.2./sub. and Ar + O.sub.2./sub. gas mixtures

HIPPLER, R., ČADA, M., HUBIČKA, Z. Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N₂ and Ar + O₂ gas mixtures. European Physical Journal D. 2022, 76(11), 214. ISSN 1434-6060. E-ISSN 1434-6079. Dostupné z: doi: 10.1140/epjd/s10053-022-00539-8.