Deformation of thin self-standing mask at inhomogeneous irradiation.

Počet záznamů: 1

1.

SYSNO	0484974
Title	Deformation of thin self-standing mask at inhomogeneous irradiation.
Author(s)	Koláček, Karel (UFP-V) [IPS]_RID Schmidt, Jiří (UFP-V) [IPS]_RID Frolov, Oleksandr (UFP-V) [IPS]_RID Štraus, Jaroslav (UFP-V) [IPS]_RID Chalupský, Jaromír (FZU-D)_{RID, ORCID} Choukourov, A. (CZ)
Source Title	Proceedings of the 3rd International Workshop on Frontiers of X&XUV Optics and its Applications, 3rd IW FX & XUVOA. - Prague : Institute of Plasma Physics Czech Academy of Sciences, 2017 / Koláček K. ; Sobota J.
Conference	International Workshop on Frontiers of X&XUV Optics and its Applications 2017, 3rd IW FX & XUVOA /3./, 04.10.2017, Prague - 06.10.2017
Article number	O-09
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LG15013 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UFP-V - RVO:61389021 ; FZU-D - RVO:68378271
Language	eng
Country	CZ
Keywords	interaction of XUV radiation with solid surface * nanostructuring * nanopatterning * XUV diffraction
Permanent Link	http://hdl.handle.net/11104/0280109

Počet záznamů: 1