The changes induced on oriented ZnO surface by inductively coupled plasma (ICP)

Remeš, Z., Artemenko, A., Ukraintsev, E., Rezek, B., Poruba, A., Hsu, H.S., Mičová, J. The changes induced on oriented ZnO surface by inductively coupled plasma (ICP). In: E-MRS Spring Meeting - Symposia & program Section N Current trends in optical and X-ray metrology of advanced materials for nanoscale devices VI. Strasbourg: European Materials Research Society (E-MRS), 2021.